Nanofabrication Cleanroom
Equipment and Processes
Photolithography Lab
Blue M Convection Oven
OAI 1000 Watt DUV Exposure System
Olympus BH2 Microscope with Infinity 2 Digital Camera
Suss MicroTec MA6 Mask Aligner
Brewer Science CEE 100CB Spin Coater
Developer Hood
Equipment and Processes
Metalization Lab
E-Beam Lab
Deposition Etch Lab
Photolithography Lab
Blue M Convection Oven
OAI 1000 Watt DUV Exposure System
Olympus BH2 Microscope with Infinity 2 Digital Camera
Suss MicroTec MA6 Mask Aligner
Brewer Science CEE 100CB Spin Coater
Developer Hood
Wet Chemistry Lab
Floorplan
Lab Training
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Lab Cameras
Lab Scheduler Login
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Environmental Sensors
MSDS
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